Specialty & Electronic Gases
We provide a wide range of high-purity Specialty & Electronic Gases to support advanced applications in electronics, semiconductor manufacturing, and precision industries. Our products ensure exceptional performance, reliability, and purity for your critical processes. Partner with us to drive innovation with the following Core Product Lines:
Fluoride - Optimized for plasma etching and chamber cleaning.
CHF₃
Trifluoromethane
CH₂F₂
Difluoromethane
CH₃F
Fluoromethane
CF₄
Carbon Tetrafluoride
C₂F₆
Hexafluoroethane
C₃F₈
Octafluoropropane
C₄F₆
Hexafluoro-1, 3-Butadiene
C₄F₈
Octafluorocyclobutane
C₅F₈
Perfluorocyclopentene
SF₄
Sulfur Tetrafluoride
SF₆
Sulfur Hexafluoride
NF₃
Nitrogen Trifluoride
CIF₃
Chlorine Trifluorid
SiF₄
Silicon Tetrafluoride
Hydrides & Oxides - Enabling epitaxial growth and ion implantation.
SiH₄
Silane
Si₂H₆
Disilane
Si₃H₈
Trisilane
PH₃
Phosphine
AsH₃
Arsine
GeH₄
Germane
Ge₂H₆
Digermane
GeH₄ / H₂
Mixtures
NH₃
Ammonia
H₂Se
Hydrogen Selenide
B₂H₆
Diborane
H₂
Hydrogen
NO
Nitric Oxide
N₂O
Nitrous Oxide
CO
Carbon Monoxide
CO₂
Carbon Dioxide
C₂H₄O
Ethylene Oxide
HF
Hydrogen Fluoride
HBr
Hydrogen Bromide
Hydrocarbons - Stable Supply. Reliable Combustion.
CH₄
Methane
C₂H₂
Acetylene
C₂H₄
Emylene
C₂H₆
Ethane
C₃H₈
Propane
C₄H₁₀
Butane
C₅H₁₂
Neopentane
C₆H₁₄
n-Hexane
C₈H₁₈
n-Octane
Rare Gases & Mixtures - precision blends for lasers and detectors.
He
Helium
Kr
Krypton
Xe
Xenon
Ne
Neon
He/Kr/Xe/Ar/Ne/F2 Mixture
Lithography Gases - excimer blends – stable wavelength control for DUV/EUV.
1.25%Kr
Ne(balance)
3.5%Ar/10ppmXe
Ne(balance)
0.95%F₂/1.25%Kr
Ne(balance)
0.95%F₂/3.5%Ar
Ne(balance)
Others
BCl₃
Boron Trichloride
SiCl₄
Silicon Tetrachloride
HSiCl₃
Trichlorosilane (TCS)
F₂
Fluorine
Br₂
Bromine
D₂
Deuterium
Cl₂
Chlorine
Packaging Options
Cylinders | Pallets | Y-Cylinders | Drums |
MicroBulk Tanks | ISO Tanks | Tube Trailer
